Publication:

Oxygen gettering cap to scavenge parasitic oxide interlayer in TiSi contacts

Date

2019-11
Journal article
https://doi.org/10.1109/LED.2019.2940819
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37994.pdf 2.16 MB

Author(s)

Yu, Hao  
;
Schaekers, Marc  
;
Wang, Linlin
;
Everaert, Jean-Luc
;
Jiang, Yu-Long
;
Mocuta, Dan
;
Horiguchi, Naoto  
;
Collaert, Nadine  
;
De Meyer, Kristin  

Journal

IEEE Electron Device Letters

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1972 since deposited on 2021-10-28
Acq. date: 2025-10-24

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1972 since deposited on 2021-10-28
Acq. date: 2025-10-24

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