Understanding the interaction mechanisms between amorphous carbon sacrificial patterning material and H2 plasma to enable area-selective ALD processes

Thumbnail
Metadata
Show full item record
Authors
Zyulkov, Ivan; Voronina, Ekaterina; Chan, BT; Rakhimova, Tatyana; De Gendt, Stefan; Armini, Silvia
Conference
PESM2019
Title
Understanding the interaction mechanisms between amorphous carbon sacrificial patterning material and H2 plasma to enable area-selective ALD processes
Publication type
Meeting abstract
Collections