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Understanding the interaction mechanisms between amorphous carbon sacrificial patterning material and H2 plasma to enable area-selective ALD processes
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1958 since deposited on 2021-10-28
1last month
Acq. date: 2026-10-03
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Statistics
Views
1958 since deposited on 2021-10-28
1last month
Acq. date: 2026-10-03
Citations