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Integration HSQ into direct-on-metal approach for 0.25µm technology

dc.contributor.authorGao, Teng
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorCoenegrachts, Bart
dc.contributor.authorBruynseraede, Christophe
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-06T11:11:40Z
dc.date.available2021-10-06T11:11:40Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3461
dc.sourceIIOimport
dc.titleIntegration HSQ into direct-on-metal approach for 0.25µm technology
dc.typeOral presentation
dc.contributor.imecauthorCoenegrachts, Bart
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceEuropean Workshop Materials for Advanced Metallization; March 8-10, 1999; Oostende, Belgium.
imec.availabilityPublished - imec


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