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Ultra-sensitive and compact on-chip gas sensor on a silicon nitride photonic integrated circuit

dc.contributor.authorAntonacci, Giuseppe
dc.contributor.authorGoyvaerts, Jeroen
dc.contributor.authorZhao, Haolan
dc.contributor.authorBaumgartner, Bettina
dc.contributor.authorLendl, Bernhard
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-28T20:10:25Z
dc.date.available2021-10-28T20:10:25Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34637
dc.sourceIIOimport
dc.titleUltra-sensitive and compact on-chip gas sensor on a silicon nitride photonic integrated circuit
dc.typeProceedings paper
dc.contributor.imecauthorAntonacci, Giuseppe
dc.contributor.imecauthorGoyvaerts, Jeroen
dc.contributor.imecauthorZhao, Haolan
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage112851E
dc.source.conferenceSilicon Photonics XV
dc.source.conferencedate1/02/2020
dc.source.conferencelocationSan Francisco USA
dc.identifier.urlhttps://doi.org/10.1117/12.2557047
imec.availabilityPublished - open access
imec.internalnotesSPIE Proceedings; Vol. 11285


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