Authors

Arimura, Hiroaki; Wostyn, Kurt; Ragnarsson, Lars-Ake; Conard, Thierry; Vaisman Chasin, Adrian; Franco, Jacopo; Mitard, Jerome; Horiguchi, Naoto

Conference

ECS 2020 Fall Meeting Symposium G03: SiGe, Ge & Related Compounds: Materials, Processing and Devices

Title

Si-cap-free low-DIT SiGe gate stack for high-performance pFETs

Publication type

Meeting abstract