Show simple item record

Visualizing the nucleation of ALD layers on polymers

dc.contributor.authorAstoreca, Laura
dc.contributor.authorTabaei, Parinaz Saadat Esbah
dc.contributor.authorSchaubroeck, David
dc.contributor.authorOp de Beeck, Maaike
dc.contributor.authorMorent, Rino
dc.contributor.authorDe Smet, Herbert
dc.contributor.authorDe Geyter, Nathalie
dc.date.accessioned2021-10-28T20:11:20Z
dc.date.available2021-10-28T20:11:20Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34653
dc.sourceIIOimport
dc.titleVisualizing the nucleation of ALD layers on polymers
dc.typeProceedings paper
dc.contributor.imecauthorAstoreca, Laura
dc.contributor.imecauthorSchaubroeck, David
dc.contributor.imecauthorOp de Beeck, Maaike
dc.contributor.imecauthorDe Smet, Herbert
dc.contributor.orcidimecOp de Beeck, Maaike::0000-0002-2700-6432
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conference20th International Conference on Atomic Layers Deposition (ALD 2020)
dc.source.conferencedate28/06/2020
dc.source.conferencelocationGhent Belgium
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
47202.pdf
Size:
498.8Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record