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The profileration of heterogeneous integration approaches in silicon(nitride) integrated photonics

dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-28T20:12:31Z
dc.date.available2021-10-28T20:12:31Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34672
dc.sourceIIOimport
dc.titleThe profileration of heterogeneous integration approaches in silicon(nitride) integrated photonics
dc.typeProceedings paper
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage112840J
dc.source.conferenceSmart Photonic and Optoelectronic Integrated Circuits XXII
dc.source.conferencedate1/02/2020
dc.source.conferencelocationSan Francisco USA
dc.identifier.urlhttps://doi.org/10.1117/12.2552113
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 11284 Keynote presentation


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