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Impact of temperature and breakdown statistics on reliability predictions for ultra-thin oxides

dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDegraeve, Robin
dc.contributor.authorKaczer, Ben
dc.date.accessioned2021-10-06T11:14:08Z
dc.date.available2021-10-06T11:14:08Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3475
dc.sourceIIOimport
dc.titleImpact of temperature and breakdown statistics on reliability predictions for ultra-thin oxides
dc.typeOral presentation
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorKaczer, Ben
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.source.peerreviewno
dc.source.conferenceMRS Fall Meeting Symposium on Structural and Electronic Properties of Ultrathin Dielectrics on Silicon and Related Structures; N
imec.availabilityPublished - imec


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