Authors

Hall, L.; Sees, J.; Hurd, Trace; Schmidt, B.; Bellay, L.; Loewenstein, Lee; Mertens, Paul

Conference

Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon

Title

Chemistry of the silicon oxide surface: adsorption from SC1 solutions

Publication type

Proceedings paper

Embargo date

9999-12-31