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The influence of AlN nucleation layer on radio frequency transmission loss of AlN-on-Si hetero-structure

dc.contributor.authorChang, Shane
dc.contributor.authorZhao, Ming
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorFranquet, Alexis
dc.contributor.authorHein, Do
dc.contributor.authorUedono, Akira
dc.contributor.authorTien Tung, Luong
dc.contributor.authorWang, Tsang Hsuan
dc.contributor.authorLi, Chang
dc.date.accessioned2021-10-28T20:39:20Z
dc.date.available2021-10-28T20:39:20Z
dc.date.issued2020
dc.identifier.issn1862-6300
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34880
dc.sourceIIOimport
dc.titleThe influence of AlN nucleation layer on radio frequency transmission loss of AlN-on-Si hetero-structure
dc.typeJournal article
dc.contributor.imecauthorZhao, Ming
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorWang, Tsang Hsuan
dc.contributor.orcidimecZhao, Ming::0000-0002-0856-851X
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecWang, Tsang Hsuan::0000-0002-7760-7500
dc.source.peerreviewyes
dc.source.beginpage1900755
dc.source.journalPhysica Status Solidi A
dc.source.issue7
dc.source.volume217
dc.identifier.urlhttps://doi.org/10.1002/pssa.201900755
imec.availabilityPublished - imec


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