dc.contributor.author | Chang, Shane | |
dc.contributor.author | Zhao, Ming | |
dc.contributor.author | Spampinato, Valentina | |
dc.contributor.author | Franquet, Alexis | |
dc.contributor.author | Hein, Do | |
dc.contributor.author | Uedono, Akira | |
dc.contributor.author | Tien Tung, Luong | |
dc.contributor.author | Wang, Tsang Hsuan | |
dc.contributor.author | Li, Chang | |
dc.date.accessioned | 2021-10-28T20:39:20Z | |
dc.date.available | 2021-10-28T20:39:20Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 1862-6300 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/34880 | |
dc.source | IIOimport | |
dc.title | The influence of AlN nucleation layer on radio frequency transmission loss of AlN-on-Si hetero-structure | |
dc.type | Journal article | |
dc.contributor.imecauthor | Zhao, Ming | |
dc.contributor.imecauthor | Spampinato, Valentina | |
dc.contributor.imecauthor | Franquet, Alexis | |
dc.contributor.imecauthor | Wang, Tsang Hsuan | |
dc.contributor.orcidimec | Zhao, Ming::0000-0002-0856-851X | |
dc.contributor.orcidimec | Spampinato, Valentina::0000-0003-3225-6740 | |
dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
dc.contributor.orcidimec | Wang, Tsang Hsuan::0000-0002-7760-7500 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1900755 | |
dc.source.journal | Physica Status Solidi A | |
dc.source.issue | 7 | |
dc.source.volume | 217 | |
dc.identifier.url | https://doi.org/10.1002/pssa.201900755 | |
imec.availability | Published - imec | |