Publication:
The influence of AlN nucleation layer on radio frequency transmission loss of AlN-on-Si hetero-structure
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1974 since deposited on 2021-10-28
1last month
Acq. date: 2026-04-06
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Statistics
Views
1974 since deposited on 2021-10-28
1last month
Acq. date: 2026-04-06
Citations