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The influence of AlN nucleation layer on radio frequency transmission loss of AlN-on-Si hetero-structure
Publication:
The influence of AlN nucleation layer on radio frequency transmission loss of AlN-on-Si hetero-structure
Date
2020
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chang, Shane
;
Zhao, Ming
;
Spampinato, Valentina
;
Franquet, Alexis
;
Hein, Do
;
Uedono, Akira
;
Tien Tung, Luong
;
Wang, Tsang Hsuan
;
Li, Chang
Journal
Physica Status Solidi A
Abstract
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1968
since deposited on 2021-10-28
Acq. date: 2025-10-27
Citations
Metrics
Views
1968
since deposited on 2021-10-28
Acq. date: 2025-10-27
Citations