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Standard cell architectures for N2 node: transition from FinFET to nanosheet and to forkheet device

dc.contributor.authorChehab, Bilal
dc.contributor.authorWeckx, Pieter
dc.contributor.authorRyckaert, Julien
dc.contributor.authorSpessot, Alessio
dc.contributor.authorVerkest, Diederik
dc.date.accessioned2021-10-28T20:39:53Z
dc.date.available2021-10-28T20:39:53Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34883
dc.sourceIIOimport
dc.titleStandard cell architectures for N2 node: transition from FinFET to nanosheet and to forkheet device
dc.typeProceedings paper
dc.contributor.imecauthorChehab, Bilal
dc.contributor.imecauthorWeckx, Pieter
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1132807
dc.source.conferenceDesign-Process-Technology Co-optimization for Manufacturability XIV
dc.source.conferencedate23/02/2020
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttps://doi.org/10.1117/12.2548573
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Volume 11328


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