Show simple item record

Characterization of silicon cantilevers with integrated pyramidal tips in atomic force microscopy

dc.contributor.authorHantschel, Thomas
dc.contributor.authorStephenson, Robert
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-06T11:16:37Z
dc.date.available2021-10-06T11:16:37Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3488
dc.sourceIIOimport
dc.titleCharacterization of silicon cantilevers with integrated pyramidal tips in atomic force microscopy
dc.typeProceedings paper
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage994
dc.source.endpage1005
dc.source.conferenceDesign, Test, and Microfabrication of MEMS and MOEMS
dc.source.conferencedate30/03/1999
dc.source.conferencelocationParis France
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 3680


Files in this item

Thumbnail
Name:
3450.pdf
Size:
1.600Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record