dc.contributor.author | Hantschel, Thomas | |
dc.contributor.author | Stephenson, Robert | |
dc.contributor.author | Trenkler, Thomas | |
dc.contributor.author | De Wolf, Peter | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-06T11:16:37Z | |
dc.date.available | 2021-10-06T11:16:37Z | |
dc.date.issued | 1999 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3488 | |
dc.source | IIOimport | |
dc.title | Characterization of silicon cantilevers with integrated pyramidal tips in atomic force microscopy | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Hantschel, Thomas | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 994 | |
dc.source.endpage | 1005 | |
dc.source.conference | Design, Test, and Microfabrication of MEMS and MOEMS | |
dc.source.conferencedate | 30/03/1999 | |
dc.source.conferencelocation | Paris France | |
imec.availability | Published - open access | |
imec.internalnotes | Proceedings of SPIE; Vol. 3680 | |