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Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices

dc.contributor.authorHantschel, Thomas
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMalavé, A.
dc.contributor.authorBüchel, D.
dc.contributor.authorKulisch, W.
dc.contributor.authorOesterschulze, E.
dc.date.accessioned2021-10-06T11:16:49Z
dc.date.available2021-10-06T11:16:49Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3489
dc.sourceIIOimport
dc.titleTip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices
dc.typeJournal article
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage113
dc.source.endpage116
dc.source.journalMicroelectronic Engineering
dc.source.issue1_4
dc.source.volume46
imec.availabilityPublished - open access
imec.internalnotesMNE 98 - International Conf. on Micro- and Nanofabrication; 22-24 September 1998; Leuven, Belgium


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