Authors

Hantschel, Thomas; Trenkler, Thomas; Vandervorst, Wilfried; Malavé, A.; Büchel, D.; Kulisch, W.; Oesterschulze, E.

Issue

1_4

Journal

Microelectronic Engineering

Volume

46

Title

Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices

Publication type

Journal article

Embargo date

9999-12-31