Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices

dc.contributor.author	Hantschel, Thomas
dc.contributor.author	Trenkler, Thomas
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.author	Malavé, A.
dc.contributor.author	Büchel, D.
dc.contributor.author	Kulisch, W.
dc.contributor.author	Oesterschulze, E.
dc.contributor.imecauthor	Hantschel, Thomas
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Hantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned	2021-10-06T11:16:49Z
dc.date.available	2021-10-06T11:16:49Z
dc.date.embargo	9999-12-31
dc.date.issued	1999
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/3489
dc.source.beginpage	113
dc.source.endpage	116
dc.source.issue	1_4
dc.source.journal	Microelectronic Engineering
dc.source.volume	46
dc.title	Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices
dc.type	Journal article
dspace.entity.type	Publication
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