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Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices
Publication:
Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices
Date
1999
Journal article
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3451.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hantschel, Thomas
;
Trenkler, Thomas
;
Vandervorst, Wilfried
;
Malavé, A.
;
Büchel, D.
;
Kulisch, W.
;
Oesterschulze, E.
Journal
Microelectronic Engineering
Abstract
Description
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1884
since deposited on 2021-10-06
420
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1884
since deposited on 2021-10-06
420
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations