Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices
Publication:
Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices
Copy permalink
Date
1999
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
3451.pdf
489.19 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hantschel, Thomas
;
Trenkler, Thomas
;
Vandervorst, Wilfried
;
Malavé, A.
;
Büchel, D.
;
Kulisch, W.
;
Oesterschulze, E.
Journal
Microelectronic Engineering
Abstract
Description
Metrics
Views
1888
since deposited on 2021-10-06
1
last month
Acq. date: 2025-12-11
Citations
Metrics
Views
1888
since deposited on 2021-10-06
1
last month
Acq. date: 2025-12-11
Citations