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The fabrication of a full metal AFM probe and its applications for Si and InP devices analysis

dc.contributor.authorHantschel, Thomas
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorXu, Mingwei
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-06T11:17:00Z
dc.date.available2021-10-06T11:17:00Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3490
dc.sourceIIOimport
dc.titleThe fabrication of a full metal AFM probe and its applications for Si and InP devices analysis
dc.typeProceedings paper
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage20
dc.source.endpage31
dc.source.conferenceMaterials and Device Characterization in Micromachining II
dc.source.conferencedate20/09/1999
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 3875


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