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Alternative metal recess for fully-self-aligned-vias

dc.contributor.authorContino, Antonino
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorSakamoto, Kei
dc.contributor.authorSchleicher, Filip
dc.contributor.authorPaolillo, Sara
dc.contributor.authorPacco, Antoine
dc.contributor.authorKesters, Els
dc.contributor.authorLorant, Christophe
dc.contributor.authorMurdoch, Gayle
dc.contributor.authorLariviere, Stephane
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorVersluijs, Janko
dc.contributor.authorJaenen, Patrick
dc.contributor.authorTeugels, Lieve
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorCiofi, Ivan
dc.contributor.authorBoccardi, Guillaume
dc.contributor.authorTokei, Zsolt
dc.contributor.authorWilson, Chris
dc.date.accessioned2021-10-28T20:50:02Z
dc.date.available2021-10-28T20:50:02Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34929
dc.sourceIIOimport
dc.titleAlternative metal recess for fully-self-aligned-vias
dc.typeMeeting abstract
dc.contributor.imecauthorContino, Antonino
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorSakamoto, Kei
dc.contributor.imecauthorSchleicher, Filip
dc.contributor.imecauthorPaolillo, Sara
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorLorant, Christophe
dc.contributor.imecauthorMurdoch, Gayle
dc.contributor.imecauthorLariviere, Stephane
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorJaenen, Patrick
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorBoccardi, Guillaume
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorWilson, Chris
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecSchleicher, Filip::0000-0003-3630-7285
dc.contributor.orcidimecLorant, Christophe::0000-0001-7363-9348
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecBoccardi, Guillaume::0000-0003-3226-4572
dc.source.peerreviewyes
dc.source.beginpageS8.5
dc.source.conference29th Materials for Advanced Metallization Conference - MAM
dc.source.conferencedate16/11/2020
dc.source.conferencelocationOnline Online
dc.identifier.urlhttps://www.web-events.net/doc/users/840/bib/globalprogramvf.pdf
imec.availabilityPublished - imec


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