dc.contributor.author | Cretu, Bogdan | |
dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Hellings, Geert | |
dc.contributor.author | Linten, Dimitri | |
dc.contributor.author | Claeys, Cor | |
dc.date.accessioned | 2021-10-28T20:53:00Z | |
dc.date.available | 2021-10-28T20:53:00Z | |
dc.date.issued | 2020 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/34942 | |
dc.source | IIOimport | |
dc.title | Discussion on the figures of merit of identified traps located in the Si flm: surface versus volume trap densities | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.imecauthor | Hellings, Geert | |
dc.contributor.imecauthor | Linten, Dimitri | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.contributor.orcidimec | Hellings, Geert::0000-0002-5376-2119 | |
dc.contributor.orcidimec | Linten, Dimitri::0000-0001-8434-1838 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 45 | |
dc.source.endpage | 51 | |
dc.source.conference | 237th ECS Spring Meeting - Advanced CMOS-compatible Semiconductor Devices 19 | |
dc.source.conferencedate | 10/05/2020 | |
dc.source.conferencelocation | Bristol UK | |
dc.identifier.url | https://doi.org/10.1149/09705.0045ecst | |
imec.availability | Published - imec | |