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Massive metrology of 2D logic patterns on BEOL EUVL

dc.contributor.authorDas, Sayantan
dc.contributor.authorKang, S.
dc.contributor.authorHalder, Sandip
dc.contributor.authorMaruyama, K.
dc.contributor.authorLeray, Philippe
dc.contributor.authorYamazaki, Y.
dc.date.accessioned2021-10-28T20:55:34Z
dc.date.available2021-10-28T20:55:34Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34953
dc.sourceIIOimport
dc.titleMassive metrology of 2D logic patterns on BEOL EUVL
dc.typeProceedings paper
dc.contributor.imecauthorDas, Sayantan
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorLeray, Philippe
dc.contributor.orcidimecDas, Sayantan::0000-0002-3031-0726
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.source.peerreviewyes
dc.source.beginpage113250J
dc.source.conferenceMetrology, Inspection, and Process Control for Microlithography XXXIV
dc.source.conferencedate23/03/2020
dc.source.conferencelocationSan Jose,CA USA
dc.identifier.urlhttps://doi.org/10.1117/12.2554543
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 11325


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