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Fundamental understanding and experimental verification of bright versus dark field imaging

dc.contributor.authorDavydova, Natalia
dc.contributor.authorFinders, Jo
dc.contributor.authorvan Lare, Claire
dc.contributor.authorMcNamara, John
dc.contributor.authorVan Setten, Eelco
dc.contributor.authorZekry, Joseph
dc.contributor.authorFliervoet, Timon
dc.contributor.authorCarpaij, Rene
dc.contributor.authorFranke, Joern-Holger
dc.contributor.authorFrommhold, Andreas
dc.contributor.authorVerch, Andreas
dc.contributor.authorKersteen, Grizelda
dc.contributor.authorCapelli, Renzo
dc.date.accessioned2021-10-28T20:56:17Z
dc.date.available2021-10-28T20:56:17Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34956
dc.sourceIIOimport
dc.titleFundamental understanding and experimental verification of bright versus dark field imaging
dc.typeProceedings paper
dc.contributor.imecauthorFliervoet, Timon
dc.contributor.imecauthorFranke, Joern-Holger
dc.contributor.imecauthorFrommhold, Andreas
dc.contributor.orcidimecFranke, Joern-Holger::0000-0002-3571-1633
dc.contributor.orcidimecFrommhold, Andreas::0000-0001-6824-5643
dc.source.peerreviewyes
dc.source.beginpage115170P
dc.source.conferenceExtreme Ultraviolet Lithography 2020
dc.source.conferencedate21/09/2020
dc.source.conferencelocationonline online
dc.identifier.urlhttps://doi.org/10.1117/12.2573161
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 11517


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