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E-TEST validation of EPE budget and metrology

dc.contributor.authorDe Poortere, Etienne
dc.contributor.authorSchelcher, Guillaume
dc.contributor.authorKissoon, Nicola
dc.contributor.authorPaolillo, Sara
dc.contributor.authorTabery, Cyrus
dc.contributor.authorHalder, Sandip
dc.contributor.authorLeray, Philippe
dc.contributor.authorMulkens, Jan
dc.contributor.authorMcManus, Moyra
dc.date.accessioned2021-10-28T21:04:27Z
dc.date.available2021-10-28T21:04:27Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34991
dc.sourceIIOimport
dc.titleE-TEST validation of EPE budget and metrology
dc.typeOral presentation
dc.contributor.imecauthorDe Poortere, Etienne
dc.contributor.imecauthorSchelcher, Guillaume
dc.contributor.imecauthorKissoon, Nicola
dc.contributor.imecauthorPaolillo, Sara
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorLeray, Philippe
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.source.peerreviewno
dc.source.conferenceSPIE advanced lithography - Metrology, Inspection, and Process Control for Microlithography XXXIV
dc.source.conferencedate23/02/2020
dc.source.conferencelocationonline online
dc.identifier.urlhttps://spie.org/AL20/conferencedetails/metrology-inspection-process-control-manufacturing?SSO=1
imec.availabilityPublished - imec


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