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Growth mechanisms and selectivity during atomic layer deposition

dc.contributor.authorDelabie, Annelies
dc.date.accessioned2021-10-28T21:11:45Z
dc.date.available2021-10-28T21:11:45Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35020
dc.sourceIIOimport
dc.titleGrowth mechanisms and selectivity during atomic layer deposition
dc.typeMeeting abstract
dc.contributor.imecauthorDelabie, Annelies
dc.source.peerreviewyes
dc.source.conferenceAVS 20th International Conference on Atomic Layer Deposition (ALD 2020) - Tutorial
dc.source.conferencedate28/06/2020
dc.source.conferencelocationvirtual conference virtual conference
dc.identifier.urlhttps://ald2020.avs.org/wp-content/uploads/2020/02/Annelies-Delabie-Tutorial-2020.pdf
imec.availabilityPublished - imec


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