CMOS processes as basis for microsystem technology
| dc.contributor.author | Hermans, Lou | |
| dc.contributor.author | Baert, Kris | |
| dc.date.accessioned | 2021-10-06T11:19:49Z | |
| dc.date.available | 2021-10-06T11:19:49Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3505 | |
| dc.source | IIOimport | |
| dc.title | CMOS processes as basis for microsystem technology | |
| dc.type | Proceedings paper | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 33 | |
| dc.source.endpage | 41 | |
| dc.source.conference | MIDEM - 35th International Conference on Microelectronics, Devices and Materials and Workshop on Microsystems | |
| dc.source.conferencedate | 13/10/1999 | |
| dc.source.conferencelocation | Ljubljana Slovenia | |
| imec.availability | Published - open access |