Show simple item record

Advanced cleaning strategies for ultra-clean silicon surfaces

dc.contributor.authorHeyns, Marc
dc.contributor.authorBearda, Twan
dc.contributor.authorCornelissen, Ingrid
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorLoewenstein, Lee
dc.contributor.authorMertens, Paul
dc.contributor.authorMertens, Sofie
dc.contributor.authorMeuris, Marc
dc.contributor.authorSchaekers, Marc
dc.contributor.authorTeerlinck, Ivo
dc.contributor.authorVos, Rita
dc.contributor.authorWolke, K.
dc.date.accessioned2021-10-06T11:20:44Z
dc.date.available2021-10-06T11:20:44Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3509
dc.sourceIIOimport
dc.titleAdvanced cleaning strategies for ultra-clean silicon surfaces
dc.typeProceedings paper
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorCornelissen, Ingrid
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorMertens, Sofie
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorVos, Rita
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage459
dc.source.conferenceProceedings of the 9th International Conference on Production Engineering - ICPE
dc.source.conferencedate29/08/1999
dc.source.conferencelocationOsaka Japan
imec.availabilityPublished - open access
imec.internalnotesJSPE publication series; Vol. 3


Files in this item

Thumbnail
Name:
3469.pdf
Size:
739.2Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record