Stress simulations of fins, wires and nanosheets

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Authors
Eneman, Geert; Veloso, Anabela; Favia, Paola; Hikavyy, Andriy; Porret, Clément; Arimura, Hiroaki; De Keersgieter, An; Pourtois, Geoffrey; Loo, Roger; Spessot, Alessio; Matagne, Philippe; Ryckaert, Julien; Horiguchi, Naoto
Conference
ECS-Fall - PRiME: SiGe, Ge, and Related Compounds: Materials, Processing, and Devices 9
Title
Stress simulations of fins, wires and nanosheets
Publication type
Proceedings paper
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