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Stress simulations of fins, wires and nanosheets

dc.contributor.authorEneman, Geert
dc.contributor.authorVeloso, Anabela
dc.contributor.authorFavia, Paola
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorPorret, Clément
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorLoo, Roger
dc.contributor.authorSpessot, Alessio
dc.contributor.authorMatagne, Philippe
dc.contributor.authorRyckaert, Julien
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-28T21:34:35Z
dc.date.available2021-10-28T21:34:35Z
dc.date.issued2020-08
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35101
dc.sourceIIOimport
dc.titleStress simulations of fins, wires and nanosheets
dc.typeMeeting abstract
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorMatagne, Philippe
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.source.peerreviewyes
dc.source.beginpageG03-1737
dc.source.conferenceECS Prime 2020 session G03 - SiGe, Ge, and Related Compounds: Materials, ...
dc.source.conferencedate4/10/2020
dc.source.conferencelocationHonolulu, HI USA
dc.identifier.urlhttps://ecs.confex.com/ecs/prime2020/meetingapp.cgi/Paper/140497
imec.availabilityPublished - imec
imec.internalnotesfull paper: zie C 46586


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