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Buried power rail integration with FinFETs for ultimate CMOS scaling

dc.contributor.authorGupta, Anshul
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorArutchelvan, Goutham
dc.contributor.authorZahedmanesh, Houman
dc.contributor.authorDevriendt, Katia
dc.contributor.authorHanssen, Frederik
dc.contributor.authorTao, Zheng
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorWang, Shouhua
dc.contributor.authorRadisic, Dunja
dc.contributor.authorKenis, Karine
dc.contributor.authorTeugels, Lieve
dc.contributor.authorSebaai, Farid
dc.contributor.authorLorant, Christophe
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorChan, BT
dc.contributor.authorSubramanian, Sujith
dc.contributor.authorSchleicher, Filip
dc.contributor.authorHopf, Toby
dc.contributor.authorPeter, Antony
dc.contributor.authorRassoul, Nouredine
dc.contributor.authorDebruyn, Haroen
dc.contributor.authorDemonie, Ingrid
dc.contributor.authorSiew, Yong Kong
dc.contributor.authorChiarella, Thomas
dc.contributor.authorBriggs, Basoene
dc.contributor.authorZhou, Daisy
dc.contributor.authorRosseel, Erik
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorCapogreco, Elena
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorBoccardi, Guillaume
dc.contributor.authorBaudot, Sylvain
dc.contributor.authorMannaert, Geert
dc.contributor.authorBontemps, Noemie
dc.contributor.authorSepulveda Marquez, Alfonso
dc.contributor.authorMertens, Sofie
dc.contributor.authorKim, Min-Soo
dc.contributor.authorDupuy, Emmanuel
dc.contributor.authorVandersmissen, Kevin
dc.contributor.authorPaolillo, Sara
dc.contributor.authorCousserier, Joris
dc.contributor.authorYakimets, Dmitry
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorChehab, Bilal
dc.contributor.authorFavia, Paola
dc.contributor.authorDrijbooms, Chris
dc.contributor.authorJaysankar, Manoj
dc.contributor.authorMorin, Pierre
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorMitard, Jerome
dc.contributor.authorWilson, Chris
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorDemuynck, Steven
dc.contributor.authorTokei, Zsolt
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-28T22:13:11Z
dc.date.available2021-10-28T22:13:11Z
dc.date.issued2020
dc.identifier.issn0018-9383
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35217
dc.sourceIIOimport
dc.titleBuried power rail integration with FinFETs for ultimate CMOS scaling
dc.typeJournal article
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorArutchelvan, Goutham
dc.contributor.imecauthorZahedmanesh, Houman
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorHanssen, Frederik
dc.contributor.imecauthorTao, Zheng
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorWang, Shouhua
dc.contributor.imecauthorRadisic, Dunja
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorLorant, Christophe
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorSubramanian, Sujith
dc.contributor.imecauthorSchleicher, Filip
dc.contributor.imecauthorHopf, Toby
dc.contributor.imecauthorPeter, Antony
dc.contributor.imecauthorRassoul, Nouredine
dc.contributor.imecauthorDebruyn, Haroen
dc.contributor.imecauthorDemonie, Ingrid
dc.contributor.imecauthorSiew, Yong Kong
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorBriggs, Basoene
dc.contributor.imecauthorZhou, Daisy
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorCapogreco, Elena
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorBoccardi, Guillaume
dc.contributor.imecauthorBaudot, Sylvain
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorSepulveda Marquez, Alfonso
dc.contributor.imecauthorMertens, Sofie
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorDupuy, Emmanuel
dc.contributor.imecauthorVandersmissen, Kevin
dc.contributor.imecauthorPaolillo, Sara
dc.contributor.imecauthorCousserier, Joris
dc.contributor.imecauthorYakimets, Dmitry
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorChehab, Bilal
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorDrijbooms, Chris
dc.contributor.imecauthorJaysankar, Manoj
dc.contributor.imecauthorMorin, Pierre
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecWang, Shouhua::0000-0002-9105-8552
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecLorant, Christophe::0000-0001-7363-9348
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecSubramanian, Sujith::0000-0001-8938-9750
dc.contributor.orcidimecSchleicher, Filip::0000-0003-3630-7285
dc.contributor.orcidimecRassoul, Nouredine::0000-0001-9489-3396
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecBoccardi, Guillaume::0000-0003-3226-4572
dc.contributor.orcidimecSepulveda Marquez, Alfonso::0000-0003-4726-177X
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecDupuy, Emmanuel::0000-0003-3341-1618
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecMorin, Pierre::0000-0002-4637-496X
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.source.peerreviewyes
dc.source.beginpage5349
dc.source.endpage5354
dc.source.journalIEEE Transactions on Electron Devices
dc.source.issue12
dc.source.volume67
dc.identifier.urlhttps://ieeexplore.ieee.org/document/9257401
imec.availabilityPublished - imec


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