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Ru as an alternative material for advanced contacts

dc.contributor.authorHosseini, Maryam
dc.contributor.authorSchaekers, Marc
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorTeugels, Lieve
dc.contributor.authorBatuk, Dmitry
dc.contributor.authorMartinez Alanis, Gerardo Tadeo
dc.contributor.authorYu, Hao
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorSchleicher, Filip
dc.contributor.authorDebruyn, Haroen
dc.contributor.authorVanstreels, Kris
dc.contributor.authorDemuynck, Steven
dc.contributor.authorTokei, Zsolt
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-28T22:36:25Z
dc.date.available2021-10-28T22:36:25Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35280
dc.sourceIIOimport
dc.titleRu as an alternative material for advanced contacts
dc.typeProceedings paper
dc.contributor.imecauthorHosseini, Maryam
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorBatuk, Dmitry
dc.contributor.imecauthorMartinez Alanis, Gerardo Tadeo
dc.contributor.imecauthorYu, Hao
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorSchleicher, Filip
dc.contributor.imecauthorDebruyn, Haroen
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecHosseini, Maryam::0000-0002-0210-4095
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecBatuk, Dmitry::0000-0002-6384-6690
dc.contributor.orcidimecMartinez Alanis, Gerardo Tadeo::0000-0001-5036-0491
dc.contributor.orcidimecYu, Hao::0000-0002-1976-0259
dc.contributor.orcidimecSchleicher, Filip::0000-0003-3630-7285
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage157
dc.source.endpage159
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate1/06/2020
dc.source.conferencelocationSan José, CA (online) usa
imec.availabilityPublished - imec


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