Sub-µm a-IGZO, fully integrated, process improved, vertical diode for crosspoint arrays

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Authors
Houshmand Sharifi, Shamin; Vaisman Chasin, Adrian; Fantini, Andrea; Dekkers, Harold; Mao, Ming; Nag, Manoj; Mertens, Sofie; Rao, Siddharth; Jossart, Nico; Crotti, Davide; Kar, Gouri Sankar
Conference
2020 IEEE International Memory Workshop (IMW)
Title
Sub-µm a-IGZO, fully integrated, process improved, vertical diode for crosspoint arrays
Publication type
Proceedings paper
Embargo date
9999-12-31
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