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New possibilities for advanced semiconductor structure analysis by combining SIMS with SPM and high performance mass spectrometry

dc.contributor.authorKayser, Sven
dc.contributor.authorPirkl, Alexander
dc.contributor.authorZakel, Julia
dc.contributor.authorFranquet, Alexis
dc.contributor.authorSpampinato, Valentina
dc.date.accessioned2021-10-28T23:09:39Z
dc.date.available2021-10-28T23:09:39Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35364
dc.sourceIIOimport
dc.titleNew possibilities for advanced semiconductor structure analysis by combining SIMS with SPM and high performance mass spectrometry
dc.typeOral presentation
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.source.peerreviewno
dc.source.conferenceMicroscopy & Microanalysis 2020 Meeting
dc.source.conferencedate2/08/2020
dc.source.conferencelocationMilwaukee USA
imec.availabilityPublished - imec


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