dc.contributor.author | Ke, Tung Huei | |
dc.contributor.author | Malinowski, Pawel | |
dc.contributor.author | Rolin, Cedric | |
dc.contributor.author | Cheyns, David | |
dc.contributor.author | Genoe, Jan | |
dc.contributor.author | Kroneneijer, Auke | |
dc.contributor.author | Akkerman, Hylke | |
dc.contributor.author | Meulenkamp, Eric | |
dc.contributor.author | Heremans, Paul | |
dc.date.accessioned | 2021-10-28T23:10:52Z | |
dc.date.available | 2021-10-28T23:10:52Z | |
dc.date.issued | 2020 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/35367 | |
dc.source | IIOimport | |
dc.title | Scaling and monolithic integration of organic and Hybrid electronic by advanced photolithography | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Ke, Tung Huei | |
dc.contributor.imecauthor | Malinowski, Pawel | |
dc.contributor.imecauthor | Rolin, Cedric | |
dc.contributor.imecauthor | Cheyns, David | |
dc.contributor.imecauthor | Genoe, Jan | |
dc.contributor.imecauthor | Akkerman, Hylke | |
dc.contributor.imecauthor | Heremans, Paul | |
dc.contributor.orcidimec | Ke, Tung Huei::0000-0001-8381-4998 | |
dc.contributor.orcidimec | Malinowski, Pawel::0000-0002-2934-470X | |
dc.contributor.orcidimec | Cheyns, David::0000-0002-1327-8752 | |
dc.contributor.orcidimec | Genoe, Jan::0000-0002-4019-5979 | |
dc.contributor.orcidimec | Heremans, Paul::0000-0003-2151-1718 | |
dc.source.peerreview | yes | |
dc.source.conference | SID China Spring On-line Technical Meeting | |
dc.source.conferencedate | 9/05/2020 | |
dc.source.conferencelocation | virtual conference china | |
imec.availability | Published - imec | |