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Impact of substrate resistivity on the high frequency performance of metal interconnect

dc.contributor.authorJenei, Snezana
dc.contributor.authorKol'dyaev, Victor
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorKuhn, Rudiger
dc.contributor.authorDeferm, Ludo
dc.date.accessioned2021-10-06T11:26:25Z
dc.date.available2021-10-06T11:26:25Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3537
dc.sourceIIOimport
dc.titleImpact of substrate resistivity on the high frequency performance of metal interconnect
dc.typeProceedings paper
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.imecauthorDeferm, Ludo
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.source.peerreviewno
dc.source.beginpage242
dc.source.endpage244
dc.source.conferenceProceedings of the International Interconnect Technology Conference - IITC; San Francisco, CA, USA.
imec.availabilityPublished - imec


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