Investigation of low temperature SiP epitaxy on 300 mm Si substrates

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Authors
Khazaka, Rami; Lima, Lucas; Rosseel, Erik; Hikavyy, Andriy; D'Costa, Vijay; Margetis, Joe; Tolle, John; Xie, Qi
Conference
ECS Prime 2020
Title
Investigation of low temperature SiP epitaxy on 300 mm Si substrates
Publication type
Meeting abstract
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