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Molecular Layer Deposition of "Magnesicone", a Magnesium-based Hybrid Material
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Authors
Kint, Jeroen
;
Mattelaer, Felix
;
Vandenbroucke, Sofie
;
Muriqi, Arbersha
;
Minjauw, Matthias
;
Nisula, Mikko
;
Vereecken, Philippe
;
Nolan, Michael
;
Dendooven, Jolien
;
Detavernier, Christophe
DOI
10.1021/acs.chemmater.9b05116
ISSN
0897-4756
Issue
11
Journal
Chemistry of Materials
Volume
32
Title
Molecular Layer Deposition of "Magnesicone", a Magnesium-based Hybrid Material
Publication type
Journal article
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