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dc.contributor.authorKint, Jeroen
dc.contributor.authorMattelaer, Felix
dc.contributor.authorVandenbroucke, Sofie
dc.contributor.authorMuriqi, Arbersha
dc.contributor.authorMinjauw, Matthias
dc.contributor.authorNisula, Mikko
dc.contributor.authorVereecken, Philippe
dc.contributor.authorNolan, Michael
dc.contributor.authorDendooven, Jolien
dc.contributor.authorDetavernier, Christophe
dc.date.accessioned2021-10-28T23:21:21Z
dc.date.available2021-10-28T23:21:21Z
dc.date.issued2020
dc.identifier.issn0897-4756
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35392
dc.sourceIIOimport
dc.titleMolecular Layer Deposition of "Magnesicone", a Magnesium-based Hybrid Material
dc.typeJournal article
dc.contributor.imecauthorVandenbroucke, Sofie
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecVandenbroucke, Sofie::0000-0002-2831-3696
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.identifier.doi10.1021/acs.chemmater.9b05116
dc.source.peerreviewyes
dc.source.beginpage4451
dc.source.endpage4466
dc.source.journalChemistry of Materials
dc.source.issue11
dc.source.volume32
imec.availabilityPublished - open access


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