dc.contributor.author | Kint, Jeroen | |
dc.contributor.author | Mattelaer, Felix | |
dc.contributor.author | Vandenbroucke, Sofie | |
dc.contributor.author | Muriqi, Arbersha | |
dc.contributor.author | Minjauw, Matthias | |
dc.contributor.author | Nisula, Mikko | |
dc.contributor.author | Vereecken, Philippe | |
dc.contributor.author | Nolan, Michael | |
dc.contributor.author | Dendooven, Jolien | |
dc.contributor.author | Detavernier, Christophe | |
dc.date.accessioned | 2021-10-28T23:21:21Z | |
dc.date.available | 2021-10-28T23:21:21Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 0897-4756 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/35392 | |
dc.source | IIOimport | |
dc.title | Molecular Layer Deposition of "Magnesicone", a Magnesium-based Hybrid Material | |
dc.type | Journal article | |
dc.contributor.imecauthor | Vandenbroucke, Sofie | |
dc.contributor.imecauthor | Vereecken, Philippe | |
dc.contributor.orcidimec | Vandenbroucke, Sofie::0000-0002-2831-3696 | |
dc.contributor.orcidimec | Vereecken, Philippe::0000-0003-4115-0075 | |
dc.identifier.doi | 10.1021/acs.chemmater.9b05116 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 4451 | |
dc.source.endpage | 4466 | |
dc.source.journal | Chemistry of Materials | |
dc.source.issue | 11 | |
dc.source.volume | 32 | |
imec.availability | Published - open access | |