Publication:

Wet-chemical cleaning of cobalt and molybdenum for advanced interconnects

Date

2020
Meeting abstract
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44667.pdf 1.68 MB

Author(s)

Le, Quoc Toan  
;
Kesters, Els  
;
Usman Ibrahim, Ansar  
;
Klipp, Andreas
;
Pacco, Antoine  
;
van der Veen, Marleen  
;
Altamirano Sanchez, Efrain  
;
Holsteyns, Frank  

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Abstract

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