Publication:

Wet-chemical cleaning of cobalt and molybdenum for advanced interconnects

Date

2020

Meeting abstract

Simple item page Full metadata Statistics

Files

44667.pdf 1.68 MB

Author(s)

;

;

Usman Ibrahim, Ansar

;

;

;

van der Veen, Marleen

;

Altamirano Sanchez, Efrain

;

Holsteyns, Frank

Statistics

2166 since deposited on 2021-10-28

Acq. date: 2026-09-12