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Fabrication of active mcrofluidics on glass with semiconductor grade material

dc.contributor.authorLiang, Boshen
dc.contributor.authorKeulemans, Grim
dc.contributor.authorEychenne, Brice
dc.contributor.authorJambaldinni, Shruti
dc.contributor.authorCheyns, David
dc.contributor.authorStakenborg, Tim
dc.contributor.authorRochus, Veronique
dc.contributor.authorHeremans, Paul
dc.contributor.authorZhang, Lei
dc.date.accessioned2021-10-28T23:59:19Z
dc.date.available2021-10-28T23:59:19Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35478
dc.sourceIIOimport
dc.titleFabrication of active mcrofluidics on glass with semiconductor grade material
dc.typeProceedings paper
dc.contributor.imecauthorLiang, Boshen
dc.contributor.imecauthorKeulemans, Grim
dc.contributor.imecauthorEychenne, Brice
dc.contributor.imecauthorJambaldinni, Shruti
dc.contributor.imecauthorCheyns, David
dc.contributor.imecauthorStakenborg, Tim
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorHeremans, Paul
dc.contributor.imecauthorZhang, Lei
dc.contributor.orcidimecLiang, Boshen::0000-0003-3299-9034
dc.contributor.orcidimecKeulemans, Grim::0000-0001-6896-7275
dc.contributor.orcidimecCheyns, David::0000-0002-1327-8752
dc.contributor.orcidimecStakenborg, Tim::0000-0001-9878-9078
dc.contributor.orcidimecHeremans, Paul::0000-0003-2151-1718
dc.contributor.orcidimecJambaldinni, Shruti::0000-0003-3925-2726
dc.contributor.orcidimecRochus, Veronique::0000-0001-9680-5724
dc.contributor.orcidimecZhang, Lei::0000-0002-7405-6352
dc.source.peerreviewyes
dc.source.beginpage316
dc.source.endpage317
dc.source.conferenceMiniaturized Systems for Chemistry and Life Sciences (μTAS 2020)
dc.source.conferencedate4/10/2020
dc.source.conferencelocationvirtual virtual
imec.availabilityPublished - imec


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