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Low-loss single-mode waveguides operating at UV/violet wavelengths and fabricated with contact optical lithography

dc.contributor.authorLin, Chupao
dc.contributor.authorSchaubroeck, David
dc.contributor.authorRoelkens, Gunther
dc.contributor.authorBaets, Roel
dc.contributor.authorLe Thomas, Nicolas
dc.date.accessioned2021-10-29T00:01:12Z
dc.date.available2021-10-29T00:01:12Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35482
dc.sourceIIOimport
dc.titleLow-loss single-mode waveguides operating at UV/violet wavelengths and fabricated with contact optical lithography
dc.typeProceedings paper
dc.contributor.imecauthorLin, Chupao
dc.contributor.imecauthorSchaubroeck, David
dc.contributor.imecauthorRoelkens, Gunther
dc.contributor.imecauthorBaets, Roel
dc.contributor.imecauthorLe Thomas, Nicolas
dc.contributor.orcidimecRoelkens, Gunther::0000-0002-4667-5092
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conferenceEuropean Conference on Integrated Optics (ECIO)
dc.source.conferencedate23/06/2020
dc.source.conferencelocationOnline Conference Online
imec.availabilityPublished - open access


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