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Epitaxial Ge-on-nothing virtual substrates for 3D device stacking technologies
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Authors
Loo, Roger
;
Porret, Clément
;
Han, Han
;
Depauw, Valerie
Conference
ECS-2020 Fall Meeting, Symposium: SiGe, Ge & Related Compounds: Materials, Processing and Devices
Title
Epitaxial Ge-on-nothing virtual substrates for 3D device stacking technologies
Publication type
Meeting abstract
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