Epitaxial Ge-on-nothing virtual substrates for 3D device stacking technologies

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Authors
Loo, Roger; Porret, Clément; Han, Han; Depauw, Valerie
Conference
PRiME 2020: SiGe, Ge, and Related Compounds: Materials, Processing, and Devices 9
Title
Epitaxial Ge-on-nothing virtual substrates for 3D device stacking technologies
Publication type
Proceedings paper
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