Authors

Mattelin, Marie; Radosavljevic, Ana; Missinne, Jeroen; Cuypers, Dieter; Kommeren, Sander; Vandael, Jos; ter Meulen, Jan Matthijs; Verduyckt, Luc; Van Steenberge, Geert

Conference

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII

Title

Fabrication and replication of high efficiency blazed gratings with grayscale electron beam lithography and UV nanoimprint lithography

Publication type

Proceedings paper

Embargo date

9999-12-31