Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Fabrication and replication of high efficiency blazed gratings with grayscale electron beam lithography and UV nanoimprint lithography
Publication:
Fabrication and replication of high efficiency blazed gratings with grayscale electron beam lithography and UV nanoimprint lithography
Copy permalink
Date
2020
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
45542.pdf
26.6 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mattelin, Marie
;
Radosavljevic, Ana
;
Missinne, Jeroen
;
Cuypers, Dieter
;
Kommeren, Sander
;
Vandael, Jos
;
ter Meulen, Jan Matthijs
;
Verduyckt, Luc
;
Van Steenberge, Geert
Journal
Abstract
Description
Metrics
Views
1977
since deposited on 2021-10-29
Acq. date: 2025-12-18
Citations
Metrics
Views
1977
since deposited on 2021-10-29
Acq. date: 2025-12-18
Citations