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Cost-performance optimisation of fine-pitch W2W bonding: functional system partitioning with heterogeneous FEOL/BEOL configurations

dc.contributor.authorMilojevic, Dragomir
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorBeyne, Eric
dc.contributor.authorDebacker, Peter
dc.contributor.authorWang, Jane
dc.contributor.authorKim, Ryan Ryoung han
dc.contributor.authorVelenis, Dimitrios
dc.date.accessioned2021-10-29T00:49:42Z
dc.date.available2021-10-29T00:49:42Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35585
dc.sourceIIOimport
dc.titleCost-performance optimisation of fine-pitch W2W bonding: functional system partitioning with heterogeneous FEOL/BEOL configurations
dc.typeProceedings paper
dc.contributor.imecauthorMilojevic, Dragomir
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorDebacker, Peter
dc.contributor.imecauthorWang, Jane
dc.contributor.imecauthorKim, Ryan Ryoung han
dc.contributor.imecauthorVelenis, Dimitrios
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.contributor.orcidimecDebacker, Peter::0000-0003-3825-5554
dc.source.peerreviewyes
dc.source.beginpage113280R
dc.source.conferenceDesign-Process-Technology Co-optimization for Manufacturability XIV
dc.source.conferencedate23/02/2020
dc.source.conferencelocationSan Jose USA
dc.identifier.urlhttps://doi.org/10.1117/12.2552036
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 11328


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