dc.contributor.author | Okudur, Oguzhan Orkut | |
dc.date.accessioned | 2021-10-29T01:31:44Z | |
dc.date.available | 2021-10-29T01:31:44Z | |
dc.date.issued | 2020-02 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/35668 | |
dc.source | IIOimport | |
dc.title | Nanoindentation methodologies for characterizing thin (porous) low dielectric constant materials and copper pads | |
dc.type | PHD thesis | |
dc.contributor.imecauthor | Okudur, Oguzhan Orkut | |
dc.contributor.orcidimec | Okudur, Oguzhan Orkut::0000-0002-4790-7772 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.contributor.thesisadvisor | De Wolf, Ingrid | |
dc.identifier.url | https://lirias.kuleuven.be/2912891?limo=0 | |
imec.availability | Published - open access | |