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Nanoindentation methodologies for characterizing thin (porous) low dielectric constant materials and copper pads

dc.contributor.authorOkudur, Oguzhan Orkut
dc.date.accessioned2021-10-29T01:31:44Z
dc.date.available2021-10-29T01:31:44Z
dc.date.issued2020-02
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35668
dc.sourceIIOimport
dc.titleNanoindentation methodologies for characterizing thin (porous) low dielectric constant materials and copper pads
dc.typePHD thesis
dc.contributor.imecauthorOkudur, Oguzhan Orkut
dc.contributor.orcidimecOkudur, Oguzhan Orkut::0000-0002-4790-7772
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorDe Wolf, Ingrid
dc.identifier.urlhttps://lirias.kuleuven.be/2912891?limo=0
imec.availabilityPublished - open access


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