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Scanning probe microscopy for atom probe tip shape monitoring

dc.contributor.authorOp de Beeck, Jonathan
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorParedis, Kristof
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-29T01:36:53Z
dc.date.available2021-10-29T01:36:53Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35678
dc.sourceIIOimport
dc.titleScanning probe microscopy for atom probe tip shape monitoring
dc.typeMeeting abstract
dc.contributor.imecauthorOp de Beeck, Jonathan
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecOp de Beeck, Jonathan::0000-0003-3471-2156
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceAtom Probe Tomography & Microscopy (APT&M) 2020
dc.source.conferencedate16/11/2020
dc.source.conferencelocationOxford UK
dc.identifier.urlhttps://www.atomprobe.com/-/media/ametekatomprobe/files/news-and-events/pdf/aptmprogrammedraft201109.pdf?dmc=1&la=en&revision=ab8adfd1-ecf4-4afa-b90e-80f8a254534f&hash=028E619DEA1AFCAABF7B724B28D040D6
imec.availabilityPublished - open access


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