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Highly sensitive silicon Mach-Zehnder interferometer-based ultrasound sensor

dc.contributor.authorOuyang, Boling
dc.contributor.authorLi, YanLu
dc.contributor.authorKruidhof, Marten
dc.contributor.authorHorsten, Roland
dc.contributor.authorBaets, Roel
dc.contributor.authorvan Dongen, Koen W.A.
dc.contributor.authorCaro, Jacob
dc.date.accessioned2021-10-29T01:43:40Z
dc.date.available2021-10-29T01:43:40Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35691
dc.sourceIIOimport
dc.titleHighly sensitive silicon Mach-Zehnder interferometer-based ultrasound sensor
dc.typeProceedings paper
dc.contributor.imecauthorLi, YanLu
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecLi, YanLu::0000-0003-3440-1972
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage112830R
dc.source.conferenceIntegrated Optics: Devices, Materials, and Technologies XXIV
dc.source.conferencedate1/02/2020
dc.source.conferencelocationSan Francisco, CA USA
dc.identifier.urlhttps://doi.org/10.1117/12.2539573
imec.availabilityPublished - open access
imec.internalnotesProceedings Volume 11283


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