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The impact of focused ion beam induced damage on scanning spreading resistance microscopy

dc.contributor.authorPandey, Komal
dc.contributor.authorParedis, Kristof
dc.contributor.authorHantschel, Thomas
dc.contributor.authorDrijbooms, Chris
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-29T01:46:48Z
dc.date.available2021-10-29T01:46:48Z
dc.date.issued2020
dc.identifier.issn2045-2322
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35697
dc.sourceIIOimport
dc.titleThe impact of focused ion beam induced damage on scanning spreading resistance microscopy
dc.typeJournal article
dc.contributor.imecauthorPandey, Komal
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorDrijbooms, Chris
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage14893
dc.source.journalScientific Reports
dc.source.volume10
dc.identifier.urlhttps://www.nature.com/articles/s41598-020-71826-w
imec.availabilityPublished - open access


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