The impact of focused ion beam induced damage on scanning spreading resistance microscopy

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Authors
Pandey, Komal; Paredis, Kristof; Hantschel, Thomas; Drijbooms, Chris; Vandervorst, Wilfried
ISSN
2045-2322
Journal
Scientific Reports
Volume
10
Title
The impact of focused ion beam induced damage on scanning spreading resistance microscopy
Publication type
Journal article
Embargo date
9999-12-31
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